PLASMATEC Mp

Optimized for defect-free processing

For state of the art thin film technologies

Compact design

Inherent current source characteristic, that ensures low current overshoot by an arc

Extremely low internal stored energy

Art.-no. : PLASMATEC Mp***

MOST FLEXIBLE IN THE SERIES

The PLASMATEC Mp is the most flexible power supply in the PLASMATEC series. It provides multiple pulse shapes, an improved DC, unipolar pulse or bipolar pulse output current / voltage. These power supplies are specially developed for plasma processes up to 800 V. In the range of 400 to 800 V the full output power is available. In DC mode the improved DC output current / voltage reduces the arc tendency compared to standard DC.

 

In unipolar pulse mode the output frequency is 76 kHz. The pulse duration can be selected from 1 to 11 µsec. This leads to a wide range duty cycle from 7.6 to 85 %.

In bipolar pulse mode the output frequency amounts to 38 kHz. The pulse duration can be varied from 1 to 11 µsec which results in a wide range duty cycle from 7.6 to 85 %. Positive and negative pulses have the same output voltage. Their number is adjustable from 1 to 255.

 

The PLASMATEC Mp units are available with 5 or 10 kW. In parallel mode 100 kW are possible with up to 10 devices. Like the other PLASMATEC power supplies the PLASMATEC Mp has high power density, extremely low stored output energy and a sophisticated, flexible, adjustable arc management. Its great robustness makes it ideal for industrial applications or research.

 

Our PLASMATEC Mp series

Article number NDCR1306F01001
Input  
Input voltage 3 x 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 10 A
Output  
Nominal output voltage [Vav] 400 – 800 V
Frequency of the output voltage [kHz] 76.923 kHz
Nominal output power [kW] 3 kW
Nominal output current [Aav] 7,5 – 3,75 A
Max. ignition voltage [Vig] 1200 … 1400 V (depending on the mains input voltage)ngsspannung)
Rise up time of ignition voltage < 1 μsec / kV
Arc recognition < 1 μsec
Passive arc energy << 3 mJ
Article number NDCR1015F01001
Input  
Input voltage 3 x 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 12 A
Output  
Nominal output voltage [Vav] 400 – 800 V
Frequency of the output voltage [kHz] 76.923 kHz
Nominal output power [kW] 5 kW
Nominal output current [Aav] 12,5 – 6,25 A
Max. ignition voltage [Vig] 1200 … 1400 V (depending on the mains input voltage)ngsspannung)
Rise up time of ignition voltage < 1 μsec / kV
Arc recognition < 1 μsec
Passive arc energy << 3 mJ
Article number NDCR1017F01001
Input  
Input voltage 3 x 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 20 A
Output  
Nominal output voltage [Vav] 400 – 800 V
Frequency of the output voltage [kHz] 76.923 kHz
Nominal output power [kW] 10 kW
Nominal output current [Aav] 25 - 12,5 A
Max. ignition voltage [Vig] 1200 … 1400 V (depending on the mains input voltage)ngsspannung)
Rise up time of ignition voltage < 1 μsec / kV
Arc recognition < 1 μsec
Passive arc energy << 3 mJ

General Technical Data

Connection in parallel up to 10 units
Synchronization up to 20 units
Interfaces I/O interface / RS232 interface
  more interfaces as option possible
Dimensions (H x W x D) 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
  3HU x 19” x 600 mm

Output