PLASMATEC AC

Optimized for defect-free processing, for state of the art thin film technologies

Compact design

12 kW from 450 V up to 2800 V

Inherent current source characteristic, that ensures no current overshoot by an arc

Extremely low internal stored energy

Water-cooled

Art.-no. : PLASMATEC AC***

PREMIUM CHOICE FOR DUAL MAGNETRON APPLICATIONS

The PLASMATEC AC is a symmetric bipolar pulsed DC power supply for PVD and PECVD. The CFC technology in the switch-mode power supply makes it a true current source, the most sophisticated solution for perfect plasma processing.

 

The PLASMATEC AC delivers a bipolar output current with an output frequency of 38.46 kHz. The pulse duration can be selected from 1 µsec to 12.7 µsec. This enables an ultra wide range duty cycle from 7.6 to 97.7 %. The digital regulation of current, voltage and power ensures most accurate values. Internal tap setting enables a flexible, wide output voltage range.

 

The PLASMATEC AC is ideal for dual magnetron applications

Our PLASMATEC AC Series

article number NACR1620F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 10 A
output  
adjustable output voltage 0 – 800 V
nominal output voltage (max. power) [Vav] 400 - 800 V
frequency of the output voltage 38.46 kHz
adjustable pulse time = Tp 1 – 12.2 μsec
nominal output power 5 kW
nominal output current [Aav] 12,5 - 6,25 A
ignition voltage 1400 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ
article number NACR1621F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 20 A
output  
adjustable output voltage 0 – 800 V
nominal output voltage (max. power) [Vav] 400 - 800 V
frequency of the output voltage 38.46 kHz
adjustable pulse time = Tp 1 – 12.2 μsec
nominal output power 10 kW
nominal output current [Aav] 25 - 12.5 A
ignition voltage 1400 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ
article number NACR1622F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 32 A
output  
adjustable output voltage 0 – 800 V
nominal output voltage (max. power) [Vav] 400 - 800 V
frequency of the output voltage 38.46 kHz
adjustable pulse time = Tp 1 – 12.2 μsec
nominal output power 20 kW
nominal output current [Aav] 50 - 25 A
ignition voltage 1400 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ
article number NACR1325F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 25 A
output  
adjustable output voltage 0 – 2800 V
nominal output voltage (max. power) [Vav] 450 - 2800 V
TAP 1 450 – 1150 V
TAP 2 870 – 2200 V
TAP 3 1100 – 2800 V
frequency of the output voltage 38.46 kHz
adjustable pulse time (Tp) 1 – 12.7 μsec
nominal output power 12 kW
nominal output current [Aav] 26 - 4,3 A
TAP 1 26 – 10,4 A
TAP 2 13,5 – 5,5 A
TAP 3 10,6 – 4,3 A
ignition voltage [Vig] TAP 1 2550 V
TAP 2 3550 V
TAP 3 4200 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ
article number NACR1326F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 25 A
output  
adjustable output voltage 0 – 1800 V
nominal output voltage (max. power) [Vav] 360 - 1800 V
TAP 1 360 - 920 V
TAP 2 550 - 1300 V
TAP 3 750 - 1800 V
frequency of the output voltage 38.46 kHz
adjustable pulse time (Tp) 1 – 12.7 μsec
nominal output power 12 kW
nominal output current [Aav] 32,5 - 6,5 A
TAP 1 32,5 - 12,7 A
TAP 2 21,3 - 9,0 A
TAP 3 15,6 - 6,5 A
ignition voltage [Vig] TAP 1 1350 V
TAP 2 1800 V
TAP 3 2700 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ
article number NACR1135F01001
input  
input voltage 3 x 400 V AC +/- 10 %
nominal frequency 50 / 60 Hz +/- 5 %
max. input current 30 A
output  
adjustable output voltage 0 – 2000 V
nominal output voltage (max. power) [Vav] 650 - 2000 V
TAP 1 650 - 1000 V
TAP 2 950 - 1400 V
TAP 3 1300 - 2000 V
frequency of the output voltage 38.46 kHz
adjustable pulse time (Tp) 1 – 12.7 μsec
nominal output power 15 kW
nominal output current [Aav] 22,5 - 7,3 A
TAP 1 22,5 - 14,6 A
TAP 2 15,4 - 10,4 A
TAP 3 11,25 - 7,3 A
ignition voltage [Vig] TAP 1 1250 V
TAP 2 1780 V
TAP 3 2540 V
rise up time of ignition voltage < 1 μsec / kV
arc recognition < 1 μsec
passive arc energy << 3 mJ

General Technical Data

connection in parallel up to 2 units
synchronisation up to 2 units
interface I/O interface / RS232 interface
  more interfaces possible as option
dimensions (h x w x d) 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
  3HU x 19” x 600 mm

At the PLASMATEC AC 0k86k2 is no connection in parallel and no synchronization possible

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Output