Power supply for electron beam evaporation processes
The VAPTEC series is specially designed for electron beam evaporation processes. This series contains
- the high voltage power supply NHCR
- the cathode heat transformer NDRG
- the XY-sweep amplifier RNTR
The newly developed NHCR is a switch-mode power supply with the state of the art current fed converter technology including a digital regulation, a configurable arc management and our patented arc current limitation. If an arc is recognized, the patented arc current limitation restricts the output current peaks up to max. five times of the rated current.
The following versions are available: with 2, 3, 5, 10 and 20 kW. The 2 and 3 kW models include the cathode heat transformer in one cabinet.
Both deliver an output voltage of 8 kV. The 5, 10 and 20 kW model has an output voltage of 10 kV. The integrated cathode transformer of the 2 and 3 kW versions provides a heat current of 26 or 35 A at an output voltage of 8 V DC.
Ion supply NDOR
As most evaporation processes use an ion source to accelerate the electrons, the necessary ion supply NDOR was developed for the VAPTEC series. It includes the anode power supply, the filament supply and measurements for the neutralization current.
XY-sweep amplifier RNTR
The XY-sweep amplifier RNTR is a power amplifier designed to drive inductive loads. Typically it works as a power source. This power amplifier is used to drive the coil device of the horizontal deflection circuit of the electron beam for the purpose of uniform material evaporation. Usually the beam in these applications should be deflected horizontally in both the X and Y directions. Therefore the deflection stage has two independent channels.
|Input voltage||NHCR: 3 x 400 V AC +/- 10 %|
|NDRG: 2 x 400 V AC +/- 10 %|
|NDOR: 3 x 400 V AC +/- 10 %|
|Frequency||50 / 60 Hz +/- 5 %|
|output NHCR:||continuous, stable adjustment from 0 to rated voltage/current/power|
|output NDRG:||continuous, stable adjustment from 0 to rated current|
|output NDOR:||More details please see selection table|
|Analogue set point||0 – 10 V for voltage/current/power directly proportional|
|Analogue monitor||0 – 10 V voltage/current/power directly proportional|
|DDigital inputs / outputs||enable HV, HV ok, error|
|RS232 for NHCR||PLC mode or Terminal mode|
|Fieldbus for NHCR||Profibus / Canbus / Ethercad als Option|