Power supplies for high voltage glow processes and more
The glow discharge power supplies of the GLOWTEC series are switch-mode power supplies that work with the state-of-the-art current fed converter technology. By the use of this technology the output of the power supply acts like a current source, which is ideal for the use in glow discharge and high voltage plasma processes. Current, voltage and power reach excellent precision due to digital regulation.
Each of these power supplies comes with an integrated configurable arc management. For simple DC glow discharge processes the GLOWTECDC is the right choice. It limits the output current by a resistor. For more sophisticated DC processes a patented and optionally integrated arc current limitation is available. It restricts the output current to max. five times of the nominal current during an arc.
TWO MORE DEVICES IN THIS SERIES: THE GLOWTEC DCp AND THE GLOWTEC AC
The GLOWTECDCp delivers a square wave unipolar pulsed output voltage up to 5 kV (8 kV on request) at an output frequency of 76 kHz.
The GLOWTEC AC a bipolar pulsed output voltage up to 5 kV (8 kV on request) at an output frequency of 38.5 kHz. The duty cycle can be adjusted in a wide range from 1 up to 11.8 μsec.
|Input voltage||3 x 400 V AC +/- 10 %|
|Frequency||50 / 60 Hz +/- 5 %|
|Output voltage Vav||continuous, stable adjustment from 0 to rated voltage/current/power/ -strom / -leistung|
|2 kV to 60 kV|
|Output power||2 kW to 15 kW (21 kW) (higher power can be realized by parallel connection)|
|Nom. output frequency DC||pure DC|
|Nom. output frequency DCp||unipolar pulsed 76 kHz|
|Nom. output frequency AC||bipolar pulsed 38.5 kHz|
|Duty cycle (DCp and AC):||adjustable from 7.6 % to 93.8 % (1 to 12.2 μsec)|
|Analogue set point||0 – 10 V for voltage/current/power directly proportional|
|Analogue monitor||0 – 10 V voltage/current/power directly proportionaldirekt proportional|
|Digital inputs / outputs||enable HV, HV ok, error|
|RS232||PLC mode or Terminal mode|
|Field bus||Profibus / Canbus / Ethercad als Option|
- Linear ion sources
- High voltage plasma like PECVD
- Glow discharge
- Micro wave processes
- Ion beam sputtering
- Corona treatment