PLASMATEC BIAS

optimized for pulsed ion etching

better film density and adhesion

adaptable to a wide range of process requirements

water-cooled

multiple units combinable for high power requirements

high performance DSP regulato

Art.-no. : PLASMATEC BIAS***

For DC, unipolare or bipolare pulses

The PLASMATEC BIAS is a switch-mode power supply product line with state of the art CFC technology. These power supplies are specially developed for bias applications and deliver a stable DC, unipolar or bipolar pulsed output voltage from 20 up to 1000 V.

 

At unipolar pulsed mode the device provides an output frequency of 1 to 30 kHz.

In bipolar pulsed mode the output frequency is adjustable from 1 to 15 kHz. The duty cycle from 1 to 95 % of the frequency can be flexibly adjusted via interface. Positive and negative pulses have the same output voltage but the duty cycle can be adjusted separately. The device is available with 7.5 or 15 kW. In parallel mode the power can be increased.

 

The PLASMATEC BIAS supplies feature a sophisticated flexible adjustable arc management, a high power density and an incomparable robustness.

 

 

Our PLASMATEC BIAS series

Article number NDCR1726F01002
Input  
Input voltage 3 x 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 34 A
Output  
Nominal output voltage [Vav] 300 – 1000 V DC
Nominal output power [kW] 7.5 kW
Nominal output current [Aav] 25 - 7,5 A
Frequency of output voltage DC
  1 kHz to 30 kHz unipolar pulsed
  1 kHz to 15 kHz unipolar pulsed
Duty cicle in pulsed Mode see picture below
Connection in parallel up to 2 units
Interfaces I/O / RS232 Schnittstelle
  more interfaces see options
Dimensions (H x W x D) 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
  3HU x 19” x 600 mm
Article number NDCR1726F01002
Input  
Input voltage 3 x 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 34 A
Output  
Nominal output voltage [Vav] 300 – 1000 V DC
Nominal output power [kW] 15 kW
Nominal output current [Aav] 50 - 15 A
Frequency of output voltage DC
  1 kHz to 30 kHz unipolar pulsed
  1 kHz to 15 kHz unipolar pulsed
Duty cicle in pulsed Mode siehe Bild unten
Connection in parallel bis zu 2 Geräte
Interfaces I/O / RS232 Schnittstelle
  more interfaces see options
Dimensions (H x W x D) 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
  3HU x 19” x 600 mm
DC POSITIV oder DC NEGATIV
1 - 6 kHz3 - 99 %21 - 26 kHz3 - 96 %
7 - 13 kHz3 - 98 %27 - 30 kHz3 - 95 %
14 - 20 kHz3 _ 97 %DC nicht gepulst100 %
BIPOLAR
FrequenzTP / pos. PulsRP / neg. Pulspos. + neg. Puls max.
1 - 2 kHz3 - 98 %1 - 96 %99 %
3 - 4 kHz3 - 97 %1 - 95 %98 %
5 - 6 kHz3 - 96 %1 - 94 %97 %
7 - 8 kHz3 - 95 %1 - 93 %96 %
9 - 10 kHz3 - 94 %1 - 92 %95 %
11 - 12 kHz3 - 93 %1 - 91 %94 %
13 - 14 kHz3 - 92 %1 - 90 %93 %
15 kHz3 - 91 %1 - 89 %92 %

 

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Output