LITEC High Voltage DC Power-Supply

The high-voltage power supplies of the LITEC series are water-cooled and specially designed for the requirements for Linear Ion source which developed after the anode layer principle.
They are available with output voltages of 3 kV and 5 kV and output power of 6 kW and 12kW.
The LITEC series is characterized by a sophisticated flexibly adjustable (via the integrated touch panel in the front panel) arc management and due to the water-cooling by an extremely compact design. In addition, both the positive or either the negative pole of the output could connected to ground. To increase the power these devices could connected in parallel. Typical  applications  in  conjunction  with  a  linear  anode  layer  gridless  ion  source  are  precleaning,  etching,  surface  modification,  ion  beam  sputter  deposition  (IBD)  and  ion  beam assisted deposition (IBAD).

Standard              
•  Analogue and digital I/O-interface       
•  RS232-interface           
•  Digital regulation (U, I, P)
•  Configurable Arc-management
  (up to four parameter sets store able)  
•  Parallel mode to increase power
•  Integrated Touch Panel

Description
• Device are in different output voltage available
• Remote control (RS232 <-> Hyper-Terminal) possible

Options
• Profibus, Canbus or EtherCat

 

APPLICATIONS:

  • PRE CLEANING
  • LINEAR IONSOURCES
  • HIGH VOLTAGE PLASMA
  • GLOW DISCHARGE
  • PLASMA PRE-/POST TREATMENT
  • PHYSICAL ETCHING

 

BASIC TECHNICAL DATA:

Mains:
Input voltage3 x 400V AC +/-10%
Frequency50 / 60 Hz +/-5%

 

 

Output (positive or negativ Output could be grounded):
Nom. output voltage Vplease see selection table
Nom. output power kWplease see selection table
Nom. output current Aplease see selection table

 

 

Interfaces:
Touch Panel in Standard integratedplease see page options
Analogue set point0-10V for voltage, current, power directly proportional
Analogue monitor0-10V current, voltage directly proportional
Digital set Point / monitor
RS232PLC-mode or Terminal-mode
Field busplease see page options

 

 

SELECTION TABLE LITEC:

MAXIMUM OUTPUT RATINGMODULE DIMENSIONCOOLINGISOLATIONMODULE NUMBERARTICLE NUMBER
kVDCmAkW(H x W x D)
3200064HU x 19" x 650mmWaterAirLITEC 0032k0NHCR1118F01001
34000124HU x 19" x 650mmWaterAirLITEC 0034k0NHCR1119F01001
5120064HU x 19" x 650mmWaterAirLITEC 0051k2NHCR1116F01001
52400124HU x 19" x 650mmWaterAirLITEC 0052k4NHCR1117F01001

 

 

 

Selection Table

Maximum Output RatingModule DimensionCoolingIsolationModule NumberArticle Number
KVDCmAkW(H x W x D)
3200064HUx19"650mmWaterAirLITEC 0032k0NHCR1118F01001
34000124HUx19"650mmWaterAirLITEC 0034k0NHCR1119F01001
5120064HUx19"650mmWaterAirLITEC 0051k2NHCR1116F01001
52400124HUx19"650mmWaterAirLITEC 0052k4NHCR1117F01001