PLASMATEC DCp

Optimized for defect-free processing for state of the art thin film technologies

Compact design: up to 20 kW in 3 HU

Extremely low internal stored energy (<< 3 mJ / 10 kW)

Water-cooled

Arc management configurable

Micro arc suppression

Art.-no. : PLASMATEC DCp***

IDEAL FOR SINGLE MAGNETRON SPUTTERING APPLICATIONS

The PLASMATEC DCp is the unipolar pulsed DC power supply in the PLASMATEC series. It is also a true current source and uses the Current Fed Converter (CFC) technology. The best way for defect-free plasma processing. The supply could deliver a DC or an unipolar pulsed DC with an output frequency of 76 kHz. The pulse on-time could be adjusted from 1 µsec up to 12.2 µsec. The power supply is available with 5, 10 or 20 kW. In parallel mode it can reach up to 200 kW. Current, voltage and power are very precisely digitally regulated.

 

The PLASMATEC DCp convinces with its high power density and great robustness, extremely low stored output energy and the flexible, adjustable arc management

The PLASMATEC DCp serie

Adjustable output voltage 0 - 800 V

Article number NDCR1014F01001
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 10 A
Output  
Adjustable output voltage 0 – 800 V
Nominal output voltage (at max.power) [Vav] 400 - 800 V
Voltage derating in pulse operation Average voltage value = 800 V x pulse duration [us]/10us s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 5 kW
Nominal output current [Aav] 12.5 – 6.25 A
Max. ignition voltage [Vig] 1400
Article number NDCR1016F01001
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 20 A
Output  
Adjustable output voltage 0 – 800 V
Nominal output voltage (at max.power) [Vav] 400 - 800 V
Voltage derating in pulse operation Average voltage value = 800 V x pulse duration [us]/10us s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 10 kW
Nominal output current [Aav] 25 – 12.5 A
Max. ignition voltage [Vig] 1400
Article number NDCR1018F01001
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 32 A
Output  
Adjustable output voltage 0 – 800 V
Nominal output voltage (at max.power) [Vav] 400 - 800 V
Voltage derating in pulse operation mittlerer Spannungswert = 800 V x Pulsdauer [us]/1Ous s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 20 kW
Nominal output current [Aav] 50 – 25 A
Max. ignition voltage [Vig] 1400

Adjustable output voltage 0 - 1000 V

Article number NDCR1014F01002
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 10 A
Output  
Adjustable output voltage 0 – 1000 V
Nominal output voltage (at max.power) [Vav] 400 - 1000 V
Voltage derating in pulse operation Average voltage value = 800 V x pulse duration [us]/10us s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 5 kW
Nominal output current [Aav] 12.5 – 5 A
Max. ignition voltage [Vig] 1400
Article number NDCR1016F01002
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 20 A
Output  
Adjustable output voltage 0 – 1000 V
Nominal output voltage (at max.power) [Vav] 400 - 1000 V
Voltage derating in pulse operation Average voltage value = 800 V x pulse duration [us]/10us s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 10 kW
Nominal output current [Aav] 25 – 10 A
Max. ignition voltage [Vig] 1400
Article number NDCR1018F01002
Input  
Input voltage 400 V AC +/- 10 %
Nominal frequency 50 / 60 Hz +/- 5 %
Max. input current 32 A
Output  
Adjustable output voltage 0 – 1000 V
Nominal output voltage (at max.power) [Vav] 400 - 1000 V
Voltage derating in pulse operation Average voltage value = 800 V x pulse duration [us]/10us s
Frequency of output voltage 76.923 kHz
Adjustable pulse on-time 1 μsec ... 12.2 μsec
Nominal output power [kW] 20 kW
Nominal output current [Aav] 50 – 20 A
Max. ignition voltage [Vig] 1400

General Technical Data

Connection in parallel up to 10 units
Synchronization up to 20 units
Interfaces I/O interface / RS232 interface
  more interfaces as option possible
Dimensions (H x W x D) 133.35 x 482.6 x 600 (725 inklusive Stecker) mm
  3HU x 19” x 600 mm

Back view

5 kW and 10 kW

20 kW

Output