Bipolar Pulsed DC Power Supply

PLASMATEC AC

The PLASMATEC AC, the bipolar pulsed DC power supply from the proven J. Schneider PLASMATEC power supply platform for PVD and PECVD is a switched-mode power supply with the modern CFC (Current Fed Converter) technology. By the use of the CFC technology the output of the power supply is a true current source, the most sophisticated solution for defect free plasma processing. The PLASMATEC AC delivers a bipolar output current with an output frequency of 38.46 kHz. The pulse duration can be selected from 1 µsec to 12.7µsec. This enables an ultra wide range duty cycle from 7.6 % to 97.7 %. The regulation of current, voltage and power reaches most accurate values via digital regulation.

Internal tap setting enable a flexible, wide output voltage range. The PLASMATEC AC is the ideal choice for dual magnetron applications.

  • Optimized for defect-free processing, for state of the art thin film Technologies
  • Small Footprint
  • 12 kW from up to 450 V to 2800 V
  • Inherent Current Source Characteristic, that insures no current overshoot by an ARC
  • Extremely low internal stored energy
  • Water cooled

Technical Data

Mains
Input voltage3 x 400 V AC± 10%
Frequency50 /60 Hz ± 5%
Output
Nominal Output voltage Vavplease see selection table
Nominal Output power kWplease see selection table
Nominal Output current Aavplease see selection table
Maximum ignition voltage Vigplease see selection table
Nominal Output frequenz38,46 kHz
Duty cycle7,6 % to 97,8 % (1 to 12,7 μsec)

Selection Table

Maximum Output Power
Modul Number
Article Number
VavAavkWVig
400 - 80012,5 - 6,2551400PLASMATEC AC 0k86k2NACR 1620F01001
400 - 80025 - 12,5101400PLASMATEC AC 0k812kNACR 1621F01001
400 - 80050 - 25201400PLASMATEC AC 0k825kNACR 1622F01001

450 - 2800

450 - 1150

870 - 2200

1100 - 2800

26 - 4,3

26,0 - 10,4

13,5 - 5,5

10,6 - 4,3

12

 

2550

3550

4200

PLASMATEC AC 2k84k3NACR 1325F01001

360 - 1800

360 - 920

550 - 1300

750 - 1800

32,5 - 6,5

32,5 - 12,7

21,3 - 9,0

15,6 - 6,5

12

 

1350

1800

2700

PLASMATEC AC 1k86k5NACR 1326F01001

650 - 2000

650 - 1000

950 - 1400

1300 - 2000

22,5 - 7,3

22,5 - 14,6

15,4 - 10,4

11,25 - 7,3

15

 

1250

1780

2540

PLASMATEC AC 2k07k3NACR 1135F01001