The PLASMATEC series is a highly reliable, primary switch-mode power supply product line. It reveals improved process technology for thin film plasma applications. With this state of the art water-cooled power supplies in IP54, J. Schneider offers different application dedicated systems to suit the specific demand.
PLASMATEC advantages at a glance:
- current source power supply for best arc handling
- most sophisticated, flexible and adjustable arc Management with extremely low passiv output energy and a high output power density
- available in a wide output power range from 3 to 20 kW
- Output power up to 200 kW in parallel Connection
Ideal for diverse Coating applications for vacuum coating processes
- hard and decorative Coatings
- achitectural / industrial glass
- flat-Panel, semiconductor, data storage, optical-, tribological- and solar applications
- DC output voltage
- for planar Targets
- ideal decoration coating (metal coating) or functional coating (hard coating, AR Coating)
- DC or unipolar pulsed Output voltage
- for planar or rotatable Targets
- ideal for single Magnetron sputtering applications
- unipolar pulsed output voltage or asymmetric output voltage
- regular negative working pulses for thin film Deposition
- fully adjustable positive pulses including separate ARC detection to enhance the coating processes
- symmetrical bipolar DC pulsed wide range output voltage
- for dual Magnetron applications
- dedicated for defectfree, state-of-the-art processing metals, oxides and nitrides
- capable of all operating modes: an improved DC Operation pulse, an unipolar pulsed operation and a bipolar pulsed Operation
- virtually combines all functions in one device
- extremely flexible power supply
- the new DC and pulsed DC cathodic ARC supply
- opens new process Windows for advanced coatings
- Especially designed for bias applications
- flexible adjustable Arc Management
- high power Density
- incomparable robustness
