LITEC

The high-voltage power supplies of the LITEC series are water-cooled and specially designed for the requirements for Linear Ion source which developed after the anode layer principle. They are available with output voltages of 3 kV and 5 kV and output power of 6 kW and 12kW. The LITEC series is characterized by a sophisticated flexibly adjustable (via the integrated touch panel in the front panel) arc management and due to the water-cooling by an extremely compact design. In addition, both the positive or either the negative pole of the output could connected to ground. To increase the power these devices could connected in parallel. Typical applications in conjunction with a linear anode layer gridless ion source are pre-cleaning, etching, surface modification, ion beam sputter deposition (IBD) and ion beam assisted deposition (IBAD).

Standard

  • Analogue and digital I/O-interface
  • RS232-interface
  • Digital regulation (U, I, P)
  • Configurable Arc-management
    (up to four parameter sets store able)
  • Parallel mode to increase power
  • Integrated Touch Panel

Description

  • Device are in different output voltage available
  • Remote control (RS232 <-> Hyper-Terminal)

Options

 • Profibus, Canbus or EtherCAT

Application

PRE CLEANING
GLOW DISCHARGE

LINEAR IONSOURCES

PLASMA PRE-/POST TREATMENT

HIGH VOLTAGE PLASMA

PHYSICAL ETCHING

Basic Technical Data

Mains:

Input voltage:

Frequency:


3 x 400V AC ± 10%

50 / 60 Hz ± 5%

Output (positive or negative Output could be grounded):

Nom. Output voltage V:

Nom. Output kW:

Nom. Output current A:

  

please see selection table

please see selection table

please see selection table

Interfaces:

Touch Panel in Standard integrated:

Analogue set Point:

 

Analogue monitor:

Digital set point / monitor

RS232

Field bus:

 

for more details please se page "options"

0-10V for voltage, current, power directly proportional

0-10V current, voltage directly proportional

 

PLC-mode or Terminal-mode

please see page options

Selection Table

Maximum Output RatingModule DimensionCoolingIsolationModule NumberArticle Number
KVDCmAkW(H x W x D)
3200064HUx19"650mmWaterAirLITEC 0032k0NHCR1118F01001
34000124HUx19"650mmWaterAirLITEC 0034k0NHCR1119F01001
5120064HUx19"650mmWaterAirLITEC 0051k2NHCR1116F01001
52400124HUx19"650mmWaterAirLITEC 0052k4NHCR1117F01001