Active Pulsed DC Power Supply

PLASMATEC Ap

The PLASMATEC Ap, the unipolar pulsed DC power supply from the proven J. Schneider PLASMATEC power supply platform for PVD, is a switched-mode power supply with the state of the art CFC (Current Fed Converter) technology. By the use of the CFC technology the output of the power supply is a true current source, the most sophisticated solution for defect free plasma processing. The PLASMATEC Ap alternatively provides a DC or unipolar pulsed DC current / voltage at an output frequency of 76 kHz. Unique for this PLASMATEC Ap unit is the optional and fully active adjustable reverse pulse mode with Arc detection.

The power supply is available with 5 kW and 10 kW. The 10 kW can be put in parallel mode to increase the power up to 80 kW. The regulation of current, voltage and power reaches most accurate values via digital regulation. The PLASMATEC Ap is characterized by a high power density and great robustness and extremely low stored output energy and a sophisticated, flexible, adjustable arc management. It is ideal for industrial applications as well as for research equipment for surface developments. Its main applications are in vacuum coating processes for hard/decorative, tribological and functional coatings, optical glasses, solar cells, architecture glasses or for flat screens. 

  • Optimized for defect-free processing, for state of the art thin film Technologies
  • Small footprint, up to 10 kW in 3 HU within active adjustable reverse pulsing
  • Extremely low internal stored energy (<3 mJ / 10 kW)
  • Water cooled

Technical Data

Mains
Input voltage3 x 400 V AC± 10%
Frequency50 /60 Hz ± 5%
Output
Nominal Output voltage Vavplease see selection table
Nominal Output power kWplease see selection table
Nominal Output current Aavplease see selection table
Maximum ignition voltage Vigplease see selection table
Nominal Output frequenz76kHz
Duty cycle (DC and unipolar pulse mode)7,6 % to 88,5 % (1 zu 11,5 μsec)
Duty cycle (unipolar with reverse pulse)7,6 % zu 88,5 % (1 zu 11,5 μsec)

Selection Table

Maximum Output power
Modul number
Article number
VpeekApeekkWpeekVig
500 - 100024 - 12121400PLASMATEC Ap 1k012kNDCR 1703F01001
500 - 100012 - 661400PLASMATEC Ap 1k06k0NDCR 1702F01001