The PLASMATEC AC, the bipolar pulsed DC power supply from the proven J. Schneider PLASMATEC power supply platform for PVD and PECVD is a switched-mode power supply with the modern CFC (Current Fed Converter) technology. By the use of the CFC technology the output of the power supply is a true current source, the most sophisticated solution for defect free plasma processing. The PLASMATEC AC delivers a bipolar output current with an output frequency of 38.46 kHz. The pulse duration can be selected from 1 µsec to 12.7µsec. This enables an ultra wide range duty cycle from 7.6 % to 97.7 %. The regulation of current, voltage and power reaches most accurate values via digital regulation.
Internal tap setting enable a flexible, wide output voltage range. The PLASMATEC AC is the ideal choice for dual magnetron applications.
Mains | |
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Input voltage | 3 x 400 V AC± 10% |
Frequency | 50 /60 Hz ± 5% |
Output | |
Nominal Output voltage Vav | please see selection table |
Nominal Output power kW | please see selection table |
Nominal Output current Aav | please see selection table |
Maximum ignition voltage Vig | please see selection table |
Nominal Output frequenz | 38,46 kHz |
Duty cycle | 7,6 % to 97,8 % (1 to 12,7 μsec) |
Maximum Output Power | Modul Number | Article Number | |||
---|---|---|---|---|---|
Vav | Aav | kW | Vig | ||
400 - 800 | 12,5 - 6,25 | 5 | 1400 | PLASMATEC AC 0k86k2 | NACR 1620F01001 |
400 - 800 | 25 - 12,5 | 10 | 1400 | PLASMATEC AC 0k812k | NACR 1621F01001 |
400 - 800 | 50 - 25 | 20 | 1400 | PLASMATEC AC 0k825k | NACR 1622F01001 |
450 - 2800 450 - 1150 870 - 2200 1100 - 2800 | 26 - 4,3 26,0 - 10,4 13,5 - 5,5 10,6 - 4,3 | 12 |
2550 3550 4200 | PLASMATEC AC 2k84k3 | NACR 1325F01001 |
360 - 1800 360 - 920 550 - 1300 750 - 1800 | 32,5 - 6,5 32,5 - 12,7 21,3 - 9,0 15,6 - 6,5 | 12 |
1350 1800 2700 | PLASMATEC AC 1k86k5 | NACR 1326F01001 |
650 - 2000 650 - 1000 950 - 1400 1300 - 2000 | 22,5 - 7,3 22,5 - 14,6 15,4 - 10,4 11,25 - 7,3 | 15 |
1250 1780 2540 | PLASMATEC AC 2k07k3 | NACR 1135F01001 |