VAPTEC E-Beam Power Supply

The VAPTEC series are specially designed for electron-beam evaporation processes. This series contains the high voltage power supply NHCR as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. The new developed NHCR, is a switched-mode power supply with the state of the art CFC (current-fed-converter)  technology  within  an  digital  regulation,  a  configurable  ARC management and our patented ARC-current limitation. If an ARC was recognized, the patented ARC-current limitation limits the output current peaks up to max. five times of the rated current.
Recently a 2kW, 3kW and 10kW version is available. At the 2kW, 3kW supply the high voltage power supply also includes the cathode heat transformer in one cabinet. The 2kW, 3kW high voltage power supply delivers an output voltage of 8kV and the 10kW an output voltage of 10kV. The integrated cathode transformer of the 2kW, 3kW version provides a heat current of 26A, 35A at an output voltage of 8V DC.
Because for the most evaporation processes an ion-source is used to accelerate the electrons, the necessary Ion supply NDOR was developed within the VAPTEC series. It includes the anode  power  supply,  the  filament  supply  and  measurements  for  the  neutralization  current. The XY-sweep amplifier RNTR is a power amplifier designed to drive inductive loads. Typically it  works  as  a  power  source.  This  power  amplifier  is  used,  to  drive  the  coil  device  of  the horizontal  deflection  circuit  of  the  electron  beam  for  the  purpose  of  uniform  material evaporation. Normally in these application the beam should be deflected horizontally in both the X and Y directions. Therefore, the deflection stage has two independent channels.

Basic Technical Data

Mains:

Input voltage  :  

 

 

Frequency: 

NHCR: 3 x 400V AC ± 10%

NDRG: 2 x 400V AC ± 10%

NDOR: 3 x 400 V AC ± 10 %

50 / 60 Hz ± 5%

Output:

Output NHCR:

Output NDRG: 

Output NDOR: 

continuous, stable adjustment from 0 to rated voltage/current/power

continuous, stable adjustment from 0 to rated current

 

More details please see selection table below

Interfaces:

Analogue set point:

Analogue monitor:

Digital set point / monitor:

RS232 for NHCR: 

Field bus for NHCR: 

0-10V for voltage, current, power directly proportional

0-10 V current, voltage directly proportional

 

PLC-mode or Terminal-mode

please see page options

SELECTION TABLE VAPTEC:

MAXIMUM OUTPUT RATINGMODULECOOLINGMODULE NUMBERARTICLE NUMBER
NHCR
High voltage power supply

Filament power supply

Dimensions

Type
kVDCmAkWVDCAW

(H x W x D)

(mm)

-825028262083HUx19"x580a)LuftVAPTEC008250 NHCR540E03001
-837538352803HUx19"x580a)LuftVAPTEC008375 NHCR1036E01001
-105005---4HUx19"x660b)LuftVAPTEC010500 NHCR
-10100010---4HUx19"x660b)LuftVAPTEC01001k NHCR1001E01001
-20105021---7HUx19"x725d)WasserVAPTEC021k0NHCR
-3070021---7HUx19"x725d)WasserVAPTEC030700NHCR
-4052521---7HUx19"x725d)WasserVAPTEC040525NHCR
-6035021---9HUx19"x725d)WasserVAPTEC060350NHCR