Product Overview

CAPTEC


The capacitor charging units of the CAPTEC series are switched power supplies in modern switch topology, which was especially designed for this application. Because of the use of this switch topology the output is quasi a current source, what is optimal fo the charging of the capacitors. The regulation data for current, voltage and rating achieve excellent accuracy and regulation speed because of the digital regulation.  Up to an output voltage of 20kV these units are air insulated, >20kV oil insulated. The units have the following features:

  • output voltage range 1kV up to 40kV
  • output Rating range 1kJ/sec up to 10kJ/sec>5kJ water cooled
  • analogue and digital I/O-interface
  • RS232-interface (local operation with hyper terminal possible)
  • optional field bus
  • digital regulation (U,I,P)
  • no overshoot of the output voltage
  • trickle charge shiftable
  • for the Rating increase switch in parallel possible 
  • easy service (with remote control configuration, Service demand o. firmware update possible)
  • efficiency >92%

 

 

 

 

GLOWTEC

The glow current power supplies of the series GLOWTEC are clocked power supplies with a modern switch topology, which was especially designed for this application. Because of the use of this switch topology the output is quasi a current source, what is optimal for glow processes respectively high voltage plasma. Each of these units includes a configurable arc-management. For simple glow processes a high voltage resistance is used to limit the arc current. For superior processes the patented Arc current limitation can be used optionally.

(it limits the short-circuit current in case of an Arc to max. 5-times of the nominal current).  The regulation data for current, voltage and rating obtain high accuracy and regulation speed because of the digital regulation. Up to an output voltage of 20kV the units are air insulated, > 20kV oil insulated. The units have the following features:

  • output voltage range 1kV up to 40kV
  • output rating range 2kW up to 30kW
    >10kW water cooled
     
  • analogue and digital I/O-interface
  • RS232-interface (local operation via  hyperterminal possible)
  • optional field bus
  • digital regulation (U,I,P) 
  • configurable Arc-management
  • up to 5kV potentialfree output (from 5kW)
  • to increase the rating, connection in parallel is possible
  • easy service (via remote control configuration, service demand or firmware update possible)
  • efficiency >92%

 

 

 

 

VAPTEC

 


The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. The VAPTEC devices include the actual high voltage power supply NHRR which provides an output voltage of 8-10kV and an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR.

Furthermore a NHCR device technology (current-fed-push-pull) was developed with a digital regulation and a current feed power transformer. Actually a 2kW, 3 kW and a 10kW version are available. At the 2kW and 3kW device the high voltage power supply also includes the filament supply. The 2kW and the 3kW high voltage power supply delivers an output of 8kV and the 10kW delivers an output voltage of 10kV. The integrated filament supply provides a voltage of 8VDC and a heat current of 26A (2kW) respectively 35A (3kW).

Because at the most evaporation processes an ion-source is used to accelerate the electrons, the necessary ion supply NDOR was be developed in the VAPTEC series.

 

 

 

 

 

LITEC

    The clocked high-voltage power supplies of the LITEC series are especially designed for the requirements of linear ion sources, which work according to the anode layer principle. They are available with output voltages of 3kV as well as 5kV and output ratings from 6kW to 12kW. The LITEC series is characterized by a very compact design because of the water cooling. Furthermore the positive as well as the negative pole of the output can be connected to earth. To increase the rating the devices can be switched in parallel. Typical applications in combination with a gridless, linear anode layer ion source are pre-cleaning, etching, surface modification, ion beam sputter depositon (IBD) and ion beam assisted deposition (IBAD).

    • output voltage range 3kV up to5kV
    • output rating range 6kW up to 12kW >watercooled
    • analogue and digital I/O-interface
    • RS232-interface (local operation possible via  hyperterminal)
    • field bus optionally 
    • digital regulation (U,I,P)
    • configurable Arc-management
    • potential free output
    • connect in parallel to increase the rating
    • easy to maintain (configuration, service demand or firmware update possible via remote control)
    • efficiency >92%

     

     

     

     

     

    WELTEC

    The clocked highvoltage power supply WELTEC was especially designed for the requirements of the e-beam welding. These units are characterized by the extremely compact design and by the possible integration of the necessary auxiliary voltage such as heating and Wehnelt supply. They are available with output voltages from 60kV up to 150kV and with output ratings from 10kW up to 20kW. The units can be switched in parallel to increase the rating. The units are characterized by the following features:

    • output voltage range 60kV or 150kV
    • output rating range 10kW or 20kW
    • analogue and digital I/O-interface
    • RS232-interface(local Operation via hyperterminal possible)
    • Fieldbus optionally 
    • digital regulation (U,I,P)
    • configurable Arc-management
    • to increase the rating they can be switched in parallel 
    • easy to maintain (configuration, Service demand or Firmware update possible)